Ink-jet fabrication of polymer microlens for optical-I/O chip packaging

被引：55

作者：

Ishii, Y ^{[1
]}

Koike, S ^{[1
]}

Arai, Y ^{[1
]}

Ando, Y ^{[1
]}

机构：

[1] Nippon Telegraph & Tel Corp, Telecommun Energy Labs, Musashino, Tokyo 1808585, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 3B期

关键词：

optical interconnections; microlens; ink-jet; VCSEL; UV-curable epoxy resin; integration; packaging;

D O I：

10.1143/JJAP.39.1490

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on a simple and versatile method of fabricating polymer microlenses that can be easily integrated with optical devices. UV-curable epoxy resin is dropped onto optical devices by an ink-jet apparatus. When the droplets touch the surface, they form into partial spheres due to their surface tension. UV light irradiation for less than five minutes call easily turn them into solid microlenses. Various microlenses, having a geometrical diameter from 20 to 140 mu m with F/1.0 to F/11.0, were successfully produced by controlling the volume and viscosity of the polymer resin and their wettability to the substrate. Their uniformity in a microlens array was measured to be within +/-1% in diameter and +/-3 mu m in pitch. Hybrid integration of an ink-jetted microlens with a wire-bonded vertical-cavity surface-emitting laser (VCSEL) was also demonstrated. When an ink-jetted microlens (45-mu m diameter, F/2.0) was formed on the aperture of an 850-nm VCSEL, the coupling efficiency into a single-mode fiber was 4 dB higher than without the microlens.

引用

页码：1490 / 1493

页数：4

共 19 条

[11] Optical interconnections for the massively parallel computer [J].

Nishimura, S ;

Inoue, H ;

Hanatani, S ;

Matsuoka, H ;

Yokota, T .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1997, 9 (07) :1029-1031

[12] A SYSTEMS PERSPECTIVE ON DIGITAL INTERCONNECTION TECHNOLOGY [J].

NORDIN, RA ;

LEVI, AFJ ;

NOTTENBURG, RN ;

OGORMAN, J ;

TANBUNEK, T ;

LOGAN, RA .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (06) :811-827

[13] IMPROVED DISTRIBUTED-INDEX PLANAR MICROLENS AND ITS APPLICATION TO 2-D LIGHTWAVE COMPONENTS [J].

OIKAWA, M ;

IGA, K ;

MISAWA, S ;

KOKUBUN, Y .

APPLIED OPTICS, 1983, 22 (03) :441-442

[14] TECHNIQUE FOR MONOLITHIC FABRICATION OF MICROLENS ARRAYS [J].

POPOVIC, ZD ;

SPRAGUE, RA ;

CONNELL, GAN .

APPLIED OPTICS, 1988, 27 (07) :1281-1284

[15] The PONI-1 parallel-optical link [J].

Rosenberg, P ;

Giboney, K ;

Yuen, A ;

Straznicky, J ;

Haritos, D ;

Buckman, L ;

Schneider, R ;

Corzine, S ;

Kiamilev, F ;

Dolfi, D .

49TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 1999 PROCEEDINGS, 1999, :763-769

[16] DRY-ETCHING FOR COHERENT REFRACTIVE MICROLENS ARRAYS [J].

STERN, MB ;

JAY, TR .

OPTICAL ENGINEERING, 1994, 33 (11) :3547-3551

[17]

THIENPORT H, 1999, 7 MICR C, P322

[18]

UCHIDA TK, 1999, 7 MICR C, P290

[19] Demonstration of a monolithic multichannel module for multi-Gb/s intra-MCM optical interconnects [J].

Verschaffelt, G ;

Buczynski, R ;

Tuteleers, P ;

Vynck, P ;

Baukens, V ;

Ottevaere, H ;

Debaes, C ;

Kufner, S ;

Kufner, M ;

Hermanne, A ;

Genoe, J ;

Coppee, D ;

Vounckx, R ;

Borghs, S ;

Veretennicoff, I ;

Thienpont, H .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (11) :1629-1631

← 1 2 →