Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition

被引：41

作者：

Hirvikorpi, Terhi ^{[1
]}

Laine, Risto ^{[1
]}

Vaha-Nissi, Mika ^{[2
]}

Kilpi, Vaino ^{[1
]}

Salo, Erkki ^{[2
]}

Li, Wei-Min ^{[1
]}

Lindfors, Sven ^{[1
]}

Vartiainen, Jari ^{[2
]}

Kentta, Eija ^{[2
]}

Nikkola, Juha ^{[3
]}

Harlin, Ali ^{[2
]}

Kostamo, Juhana ^{[1
]}

机构：

[1] Picosun Oy, FI-02150 Espoo, Finland

[2] VTT Tech Res Ctr Finland, FI-02044 Espoo, Vtt, Finland

[3] VTT Tech Res Ctr Finland, FI-33101 Tampere, Finland

来源：

THIN SOLID FILMS | 2014年 / 550卷

关键词：

Atomic layer deposition; Barrier; Roll-to-roll; Flexible material; Aluminum oxide; Polymer; GAS-DIFFUSION BARRIERS; ALUMINUM-OXIDE; PACKAGING MATERIALS; GROWTH; COATINGS; TRIMETHYLALUMINUM; POLYMERS;

D O I：

10.1016/j.tsf.2013.10.148

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin (30-40 nm) and highly uniform Al2O3 coatings have been deposited at relatively low temperature of 100 degrees C onto various polymeric materials employing the atomic layer deposition (ALD) technique, both batch and roll-to-roll (R2R) mode. The applications for ALD have long been limited those feasible for batch processing. The work demonstrates that R2R ALD can deposit thin films with properties that are comparable to the film properties fabricated by in batch. This accelerates considerably the commercialization of many products, such as flexible, printed electronics, organic light-emitting diode lighting, third generation thin film photovoltaic devices, high energy density thin film batteries, smart textiles, organic sensors, organic/recyclable packaging materials, and flexible displays, to name a few. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：164 / 169

页数：6

共 31 条

[1] New ways to enhance the functionality of paperboard by surface treatment - a review [J].