Interface-controlled Schottky barriers on InP and related materials

被引:22
作者
Hasegawa, H [1 ]
机构
[1] HOKKAIDO UNIV,GRAD SCH ELECT & INFORMAT ENGN,SAPPORO,HOKKAIDO 060,JAPAN
关键词
D O I
10.1016/S0038-1101(97)00087-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Schottky barriers on InP and related material produced by conventional metal deposition processes are known to exhibit almost metal-independent low Schottky barrier heights (SBHs) caused by Fermi-level pinning phenomenon. It is shown in this article that removal of Fermi-level pinning and substantial increase of SBH values can be realized on InP-based materials by a controlled formation of Schottky interfaces using a novel, extremely low-energy, damage-free, in-situ electrochemical process. Increased SBHs of 0.89 eV, 0.50 eV and 0.89 eV are obtained for n-InP, n-In0.53Ga0.47As and n-In0.52Al0.48As, respectively, by electrochemical deposition of Pt. After briefly reviewing the Fermi level pinning phenomenon, details of the novel in-situ electrochemical process are presented together with some device applications. An attempt was made to explain the underlying mechanism for the observed SBH increases on the basis of the disorder-induced gap state (DIGS) model for Fermi-level pinning. (C) 1997 Elsevier Science Ltd.
引用
收藏
页码:1441 / 1450
页数:10
相关论文
共 20 条
[1]   UNIFIED DISORDER INDUCED GAP STATE MODEL FOR INSULATOR-SEMICONDUCTOR AND METAL-SEMICONDUCTOR INTERFACES [J].
HASEGAWA, H ;
OHNO, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (04) :1130-1138
[2]  
Hasegawa H., 1995, METAL SEMICONDUCTOR, P280
[3]  
HASEGAWA H, 1986, 18TH P INT C PHYS SE, V1, P291
[4]  
HASEGAWA H, 1997, IN PRESS J VAC SCI T
[5]   DEEP LEVEL CHARACTERIZATION OF SUBMILLIMETER-WAVE GAAS SCHOTTKY DIODES PRODUCED BY A NOVEL INSITU ELECTROCHEMICAL PROCESS [J].
HASHIZUME, T ;
HASEGAWA, H ;
SAWADA, T ;
GRUB, A ;
HARTNAGEL, HL .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (1B) :486-490
[6]   NOVEL IN-SITU ELECTROCHEMICAL TECHNOLOGY FOR FORMATION OF OXIDE-FREE AND DEFECT-FREE SCHOTTKY CONTACT TO GAAS AND RELATED LOW-DIMENSIONAL STRUCTURES [J].
HASHIZUME, T ;
SCHWEEGER, G ;
WU, NJ ;
HASEGAWA, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (04) :2660-2666
[7]   THEORY OF SURFACE STATES [J].
HEINE, V .
PHYSICAL REVIEW, 1965, 138 (6A) :1689-&
[8]   DEEP LEVELS AND A POSSIBLE D-X-LIKE CENTER IN MOLECULAR-BEAM EPITAXIAL INXAL1-XAS [J].
HONG, WP ;
DHAR, S ;
BHATTACHARYA, PK ;
CHIN, A .
JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (04) :271-274
[9]   Novel GaAs-based single-electron transistors with Schottky in-plane gates operating up to 20 K [J].
Jinushi, K ;
Okada, H ;
Hashizume, T ;
Hasegawa, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (2B) :1132-1139
[10]   THE EFFECT OF GROWTH TEMPERATURE ON THE ELECTRICAL-PROPERTIES OF ALINAS/INP GROWN BY MOLECULAR-BEAM EPITAXY AND METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION [J].
LUO, JK ;
THOMAS, H ;
CLARK, SA ;
WILLIAMS, RH .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (11) :6726-6733