Epitaxial superlattices of TiAg alloy/MgO grown on MgO(001)

High crystalline quality epitaxial metal/insulator superlattices composed of Ti1-xAgx (0.03<x<0.06) and MgO have been grown on MgO(001) substrates at 273 K by electron beam evaporation in ultrahigh vacuum, X-ray diffraction measurements and cross-sectional high-resolution transmission electron microscopy measurements revealed that the crystal structures of the TiAg alloy and MgO in the superlattices were tetragonal and that the superlattices were so-called strained-layer superlattices, The x-ray rocking curve was measured around one of satellite peaks in the middle angle range, and showed the full width at half-maximum of the curve was 0.04 degrees -0.05 degrees. (C) 1996 American Institute of Physics.