Conditions for seeded growth of GaN crystals by the Na flux method

被引:39
作者
Aoki, M
Yamane, H
Shimada, M
Sarayama, S
DiSalvo, FJ
机构
[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Ricoh Co Ltd, Res & Dev Grp, R&D Ctr, Dept 5, Sendai, Miyagi 9811241, Japan
[3] Cornell Univ, Dept Chem & Chem Biol, Ithaca, NY 14853 USA
关键词
GaN; single crystal; seeded growth; growth condition;
D O I
10.1016/S0167-577X(02)00572-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Conditions for seeded growth of GaN crystals by the Na flux method were investigated. Seeded growth in the Na flux could be achieved under temperature-N-2 pressure conditions between the condition of GaN formation without seeding and the condition of GaN decomposition. GaN single crystals with a maximum area of 3.0 x 1.5 mm(2) and thickness of 1.0 mm were gown from seeds at 850 degreesC and 2 MPa of N-2 for 200 h. The crystal growth occurred selectively on the (0001) Ga-polar surface of the platelet seed crystals. The growth rate in the c direction was higher than those of other directions and increased with growth temperature and N-2 pressure. The maximum growth rate in the c direction was about 4 mum/h at 850 degreesC and 2 MPa of N-2. (C) 2002 Elsevier Science B.V All rights reserved.
引用
收藏
页码:660 / 664
页数:5
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