Scaling laws for oxygen discharge plasmas

被引：19

作者：

Bogdanov, EA

Kolobov, VI

Kudryavtsev, AA

Tsendin, LD

机构：

[1] CFD Res Corp, Huntsville, AL 35805 USA

[2] St Petersburg State Tech Univ, St Petersburg 195251, Russia

来源：

TECHNICAL PHYSICS | 2002年 / 47卷 / 08期

基金：

俄罗斯基础研究基金会;

关键词：

D O I：

10.1134/1.1501672

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters-the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension. (C) 2002 MAIK "Nauka / Interperiodica".

引用

页码：946 / 954

页数：9

共 28 条

[1] Charged species profiles in oxygen plasma [J].