Structural and optical properties of rare-earth-doped Y2O3 waveguides grown by pulsed-laser deposition

被引:60
作者
Pons-Y-Moll, O
Perriere, J
Millon, E
Defourneau, RM
Defourneau, D
Vincent, B
Essahlaoui, A
Boudrioua, A
Seiler, W
机构
[1] Univ Paris 06, GPS, F-75251 Paris 05, France
[2] Univ Paris 07, GPS, F-75251 Paris, France
[3] Univ Metz, CLOES, LMOPS, F-57070 Technopole Metz 2000, France
[4] Supelec, F-57070 Technopole Metz 2000, France
[5] ENSAM, L3M, F-75013 Paris, France
[6] Univ Metz, IPC, LSMCL, F-57078 Technopole Metz 2000, France
关键词
D O I
10.1063/1.1508422
中图分类号
O59 [应用物理学];
学科分类号
摘要
Crystalline rare-earth-doped yttrium oxide thin films were grown by pulsed-laser deposition (PLD) on SiO2/Si substrates. The structural and morphological features of these films were studied, as a function of the growth conditions (temperature from 200 to 800 degreesC and oxygen pressure from 10(-6) to 0.5 mbar), by using Rutherford backscattering spectroscopy, x-ray diffraction, and atomic force microscopy. The related optical properties were investigated by m-lines spectroscopy at 633 nm and 1.3 mum. The optimal conditions were found to be a temperature and a pressure of 700 degreesC and 10(-6) mbar, respectively. In that case, the Y2O3 films are stoichiometric with controlled erbium and europium rates, and present a well-crystallized, (111) textured cubic phase and a low surface roughness of about 10 Angstrom. Moreover, the PLD films show good waveguiding properties with a high refractive index (1.92 at 633 nm), a step-index structure, and low optical losses around 1 dB/cm in the near infrared region, promising for a planar amplifier function. (C) 2002 American Institute of Physics.
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页码:4885 / 4890
页数:6
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