Polarisation-insensitive high-speed InGaAs metal-semiconductor-metal photodetectors

被引:5
作者
Bottcher, EH
Droge, E
Strittmatter, A
机构
[1] Inst. fur Festkorperphysik I, Technische Universität Berlin, D-10623 Berlin
关键词
gallium indium arsenide; metal-semiconductor-metal structures; photodetector;
D O I
10.1049/el:19970597
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-speed InGaAs metal-semiconductor-metal (MSM) photodetectors with circularly shaped finger electrodes have bren fabricated in order to minimise the strong polarisation dependence of the responsivity of conventional MSM detectors with linear finger electrodes. Under front illumination with 1.55 mu m light, the circular devices with electrode feature sizes as small as 0.6 mu m are demonstrated to be virtually free of polarisation effects. High-speed performance (3dB bandwidth up to 18.5GHz) is also reported.
引用
收藏
页码:912 / 914
页数:3
相关论文
共 7 条
[1]  
BAYNES ND, 1994, OSA TECHNICAL DIGEST, V8
[2]   Ultra-wide-band (> 40 GHz) submicron InGaAs metal-semiconductor-metal photodetectors [J].
Bottcher, EH ;
Droge, E ;
Bimberg, D ;
Umbach, A ;
Engel, H .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (09) :1226-1228
[3]  
BOTTCHER EH, 1997, IN PRESS IEEE PHOTON, V9
[4]   OPTIMIZATION OF HIGH-SPEED METAL-SEMICONDUCTOR-METAL PHOTODETECTORS [J].
BURM, J ;
LITVIN, KI ;
SCHAFF, WJ ;
EASTMAN, LF .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (06) :722-724
[5]   POLARIZATION AND WAVELENGTH DEPENDENCE OF METAL-SEMICONDUCTOR-METAL PHOTODETECTOR RESPONSE [J].
KUTA, JJ ;
VANDRIEL, HM ;
LANDHEER, D ;
ADAMS, JA .
APPLIED PHYSICS LETTERS, 1994, 64 (02) :140-142
[6]   COUPLED-WAVE ANALYSIS OF LAMELLAR METAL TRANSMISSION GRATINGS FOR THE VISIBLE AND THE INFRARED [J].
KUTA, JJ ;
VANDRIEL, HM ;
LANDHEER, D ;
FENG, Y .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1995, 12 (05) :1118-1127
[7]   INGAAS METAL-SEMICONDUCTOR-METAL PHOTODETECTORS FOR LONG WAVELENGTH OPTICAL COMMUNICATIONS [J].
SOOLE, JBD ;
SCHUMACHER, H .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1991, 27 (03) :737-752