Bulk acoustic resonator based on piezoelectric ZnO belts

被引：109

作者：

Buchine, Brent A.

Hughes, William L.

Degertekin, F. Levent

Wang, Zhong L. ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA

[2] Georgia Inst Technol, George W Woodruff Sch Mech Engn, Atlanta, GA 30332 USA

来源：

NANO LETTERS | 2006年 / 6卷 / 06期

关键词：

D O I：

10.1021/nl060351x

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt-Leedom-Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.

引用

页码：1155 / 1159

页数：5

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