Preparation of large area and investigation of initial film growth of YBa2Cu3O7 by scanning pulsed laser deposition

被引：18

作者：

Wu, KH

Wang, RC

Chen, SP

Lin, HC

Juang, JY

Uen, TM

Gou, YS

机构：

[1] Institute of Electrophysics, National Chiao Tung University

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 03期

关键词：

D O I：

10.1063/1.118081

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A pulsed laser deposition system with a rotating reflector, which can generate an extended plume with a diameter of about 40 mm, has been proven to be viable in producing large area YBa2Cu3O7 (YBCO) thin films. Films with uniformity of thickness and electrical properties to within a few percents were obtained. By making a further modification on this laser scanning system, YBCO films with various thicknesses can be deposited in situ on several pieces of substrates under essentially identical deposition conditions, and particularly, in a continuous fashion. The atomic force microscopy (AFM) images reveal that films grown on NdGaO3 follow the Stranski-Krastanov (layer then island growth) mode, while films grown on as-polished MgO and on annealed MgO follow the Volmer-Weber (islands without layer growth) mode and step-flow mode, respectively. (C) 1996 American Institute of Physics.

引用

收藏

页码：421 / 423

页数：3

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