NATURE OF PREFERRED ORIENTATION OF YBA2CU3OX THIN-FILMS

被引：65

作者：

MUKAIDA, M

MIYAZAWA, S

机构：

[1] NTT LSI Laboratories, Atsugi-shi Kanagawa, 243-01

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1993年 / 32卷 / 10期

关键词：

YBA2CU3O-CHI; EPITAXY; PREFERENTIAL ORIENTATION; LATTICE MATCHING;

D O I：

10.1143/JJAP.32.4521

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

To clarify a preferential orientation of YBa2Cu3Ox thin films, the growth parameters of a- an c-axis oriented thin films are investigated. YBa2Cu3Ox thin films are grown on different lattice-mismatching substrates, such as Nd: YAlO3 (001), LaAlO3 (100), NdGaO3 (110), PrGaO3 (001), SrTiO3 (100) and MgO (100) by pulsed laser deposition (PLD) to determine the a- and c-axis preferential orientation phase diagrams. These a- and c-axis preferential orientations are controlled by the lattice constant of the substrate, the substrate temperature during deposition, the oxygen pressure in the growth chamber, and the laser power. The existence of a c-axis oriented Ya2Cu3Ox layer between the substrate and a-axis oriented YBa2Cu3Ox thin films is explained.

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页码：4521 / 4528

页数：8

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