AlGaInP/GaP light-emitting diodes fabricated by wafer direct bonding technology

被引:9
作者
Chang, SJ
Sheu, JK
Su, YK
Jou, MJ
Chi, GC
机构
[1] IND TECHNOL RES INST,OPTOELECT & SYST LABS,HSINCHU 31015,TAIWAN
[2] NATL CENT UNIV,DEPT PHYS,CHUNGLI 32054,TAIWAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 08期
关键词
AlGaInP; LED; wafer direct bonding; MOVPE; GaP;
D O I
10.1143/JJAP.35.4199
中图分类号
O59 [应用物理学];
学科分类号
摘要
An AlGaInP/GaP light-emitting diode was fabricated by wafer direct bonding technique. The device was grown on GaAs substrate by metalorganic vapor phase epitaxy (MOVPE). After bonding the n-GaP substrate on top of the epitaxial layers, the original GaAs substrate was removed. The luminous intensity of this wafer-bonded device is around 60 mcd/S-r at an operation current of 20 mA. It is about two times brighter than the conventional device with absorbing GaAs substrate. The large lattice constant mismatch (3.6%) between wafer-bonded GaP substrate and GaInP did not degrade the device characteristics.
引用
收藏
页码:4199 / 4202
页数:4
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