AlGaInP/GaP light-emitting diodes fabricated by wafer direct bonding technology
被引:9
作者:
Chang, SJ
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机构:IND TECHNOL RES INST,OPTOELECT & SYST LABS,HSINCHU 31015,TAIWAN
Chang, SJ
Sheu, JK
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机构:IND TECHNOL RES INST,OPTOELECT & SYST LABS,HSINCHU 31015,TAIWAN
Sheu, JK
Su, YK
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机构:IND TECHNOL RES INST,OPTOELECT & SYST LABS,HSINCHU 31015,TAIWAN
Su, YK
Jou, MJ
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机构:IND TECHNOL RES INST,OPTOELECT & SYST LABS,HSINCHU 31015,TAIWAN
Jou, MJ
Chi, GC
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机构:IND TECHNOL RES INST,OPTOELECT & SYST LABS,HSINCHU 31015,TAIWAN
Chi, GC
机构:
[1] IND TECHNOL RES INST,OPTOELECT & SYST LABS,HSINCHU 31015,TAIWAN
[2] NATL CENT UNIV,DEPT PHYS,CHUNGLI 32054,TAIWAN
来源:
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
|
1996年
/
35卷
/
08期
关键词:
AlGaInP;
LED;
wafer direct bonding;
MOVPE;
GaP;
D O I:
10.1143/JJAP.35.4199
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
An AlGaInP/GaP light-emitting diode was fabricated by wafer direct bonding technique. The device was grown on GaAs substrate by metalorganic vapor phase epitaxy (MOVPE). After bonding the n-GaP substrate on top of the epitaxial layers, the original GaAs substrate was removed. The luminous intensity of this wafer-bonded device is around 60 mcd/S-r at an operation current of 20 mA. It is about two times brighter than the conventional device with absorbing GaAs substrate. The large lattice constant mismatch (3.6%) between wafer-bonded GaP substrate and GaInP did not degrade the device characteristics.