Separate and independent control of interfacial band alignments and dielectric constants in transition metal rare earth complex oxides

被引:33
作者
Lucovsky, G
Zhang, Y
Whitten, JL
Schlom, DG
Freeouf, JL
机构
[1] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA
[2] N Carolina State Univ, Dept Chem, Raleigh, NC 27695 USA
[3] Penn State Univ, Dept Mat Sci, University Pk, PA 16802 USA
[4] Oregon Grad Inst, Dept Elect Engn, Portland, OR 97291 USA
关键词
high-k dielectrics; transition metal oxides; rare earth oxides; complex mixed oxides;
D O I
10.1016/j.mee.2004.01.006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Spectroscopic studies of transition metal (Tm) and rare earth (Re) oxides, combined with ab initio theory, identify the band edge electronic structure of alternative high-k dielectrics. The lowest conduction band states are derived from anti-bonding transition metal d*-states with a pi symmetry and show strong final state effects. Applied to the complex Tm/Re mixed oxides of the general form ReTmO3, this approach identifies a novel way for obtaining separate and independent control of band gap energies and dielectric constants through local bonding arrangements in which Tin and Re atoms are nearest neighbors to the same oxygen atom. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:288 / 293
页数:6
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