Surface micromachined paraffin-actuated microvalve

被引：65

作者：

Carlen, ET ^{[1
]}

Mastrangelo, CH

机构：

[1] Corning IntelliSense Corp, Wilmington, MA 01887 USA

[2] Univ Michigan, Dept Elect Engn & Comp Sci, Ctr Integrated Sensors & Circuits, Ann Arbor, MI 48109 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2002年 / 11卷 / 05期

基金：

美国国家科学基金会;

关键词：

microflow control; microvalves; paraffin microactuators;

D O I：

10.1109/JMEMS.2002.803288

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Normally-open microvalves have been fabricated and tested which use a paraffin microactuator as the active element. The entire structure with nominal dimension of diameter 5600 mum x 30 mum is batch-fabricated by surface micromachining the actuator and channel materials on top of a single substrate. Gas flow rates in the 0.01-0.1 sccm range have been measured for several devices with actuation powers ranging from 50 to 150 mW on glass substrates. Leak rates as low as 500 musccm have been measured. The normally-open blocking microvalve structure has been used to fabricate a precision flow control system of microvalves consisting of four blocking valve structures. The control valve is designed to operate over a 0.01-5.0 sccm flow range at a differential pressure of 800 torr. Flow rates ranging from 0.02 to 4.996 sccm have been measured. Leak rates as low as 3.2 msccm for the four valve system have been measured.

引用

页码：408 / 420

页数：13