Zinc Malonate Based Precursors for MOCVD of ZnO

This work deals with the development of alternative metal organic precursor compounds for the growth of zinc oxide by MOCVD. In this regard we focused on fluorine-free zinc complexes using chelating ligands. A series of Bis(malonato)zinc(II) complexes was synthesized and characterized by elemental analysis (EA), mass spectrometry (MS), proton and carbon NMR spectroscopy. The precursor properties were investigated by solubility and sublimation studies, differential thermal analysis (DTA) and thermogravimetry (TG). Density Functional Theory (DFT) studies were performed to investigate the influence of the ligand environment on the heat of formation of the precursors and their reactivity towards humidity.