Plasmas for lab-on-the-chip applications

被引:78
作者
Miclea, M [1 ]
Kunze, K [1 ]
Franzke, J [1 ]
Niemax, K [1 ]
机构
[1] Inst Spectrochem & Appl Spect, D-44139 Dortmund, Germany
关键词
microplasma; miniaturized analytical instrumentation; atomic emission detector; diode laser atomic absorption spectrometry; halogenated hydrocarbons;
D O I
10.1016/S0584-8547(02)00067-8
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Two small-size plasmas used as detectors of halogenated hydrocarbons and suitable for miniaturized instrumentation are discussed. A reduced pressure dielectric barrier discharge was integrated in a diode laser atomic absorption spectrometer and the already reported chlorine detection limits of 5 ppm (v/v) can be improved with one order of magnitude by spatially resolved measurements. A microstructured electrode discharge at atmospheric pressure was coupled with a miniaturized Echelle spectrometer and detection limits were found to be 20 ppb for chlorine as well as for fluorine. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1585 / 1592
页数:8
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