Sputtered thin films of CuBr for ammonia microsensors: morphology, composition and ageing

被引：33

作者：

Bendahan, M ^{[1
]}

Lauque, P ^{[1
]}

Lambert-Mauriat, C ^{[1
]}

Carchano, H ^{[1
]}

Seguin, JL ^{[1
]}

机构：

[1] Fac Sci & Tech St Jerome, CNRS, UMR 6137, Serv 152,L2MP,Lab Mat & Microelect Provence, F-13397 Marseille 20, France

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2002年 / 84卷 / 01期

关键词：

gas sensor; ammonia; copper bromide; thin film; sputtering;

D O I：

10.1016/S0925-4005(02)00004-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Sensitive and selective ammonia sensors were realised by sputter depositing a CuBr film on copper interdigitated electrodes. The effect of the self bias voltage on the composition and morphology of the films was analysed. Films deposited with a self bias voltage above 400 V are well adapted to sensor application since they show a large specific area. Ageing of the films is related to copper diffusion from the electrodes into an originally sub-stoichiometric Cu1-xBr film. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：6 / 11

页数：6

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