Raman study of silicon nanocrystals formed in SINx films by excimer laser or thermal annealing

被引：77

作者：

Volodin, VA ^{[1
]}

Efremov, MD ^{[1
]}

Gritsenko, VA ^{[1
]}

Kochubei, SA ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Semicond Phys, SB, Novosibirsk 630090, Russia

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 09期

关键词：

D O I：

10.1063/1.122130

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon nitride films of different stoichiometric composition were studied using Raman spectroscopy. A Raman signal due to Si-Si, Si-N bond vibrations in silicon nanoclusters was detected in as-deposited films. The appearance of Raman peaks in the range 493-514 cm(-1) after thermal and pulse laser treatments was interpreted as formation of silicon nanocrystals with sizes from 1.3 up to 5 nm depending on treatment parameters. Thermal treatment at 1200 degrees C allowed Si atom diffusion and its gathering in Si nanocrystals, meanwhile 5 ns pulse laser irradiation leads to crystallization of preexisting silicon nanoclusters inside the as-deposited SiNx films. (C) 1998 American Institute of Physics. [S0003-6951(98)03334-8].

引用

页码：1212 / 1214

页数：3

共 5 条

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