2D-confined nanochannels fabricated by conventional micromachining

被引：82

作者：

Tas, NR ^{[1
]}

Berenschot, JW ^{[1
]}

Mela, P ^{[1
]}

Jansen, HV ^{[1
]}

Elwenspoek, M ^{[1
]}

van den Berg, A ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands

来源：

NANO LETTERS | 2002年 / 2卷 / 09期

关键词：

D O I：

10.1021/nl025693r

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Two new methods have been developed to fabricate nanochannels by conventional micromachining. We succeeded in restricting the width of the channels to the submicrometer scale, while using standard photolithography with a resolution in the order of 1 mum. The first method is based on the sacrificial etching of a nanowire, which was formed on the side wall of a step. The second method is based on the adhesion of the capping layer to the substrate after removal of a sacrificial strip separating the two. The fabricated nanochannels are localized and can be connected to microchannels and reservoirs.

引用

页码：1031 / 1032

页数：2

共 18 条

[1] CAPILLARITY-INDUCED FILLING OF CARBON NANOTUBES [J].

AJAYAN, PM ;

IIJIMA, S .

NATURE, 1993, 361 (6410) :333-334

[2] BOND-STRENGTH MEASUREMENTS RELATED TO SILICON SURFACE HYDROPHILICITY [J].

BACKLUND, Y ;

HERMANSSON, K ;

SMITH, L .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1992, 139 (08) :2299-2301

[3] CAPILLARITY AND WETTING OF CARBON NANOTUBES [J].

DUJARDIN, E ;

EBBESEN, TW ;

HIURA, H ;

TANIGAKI, K .

SCIENCE, 1994, 265 (5180) :1850-1852

[4] 3-D silicon photonic lattices - cornerstone of an emerging photonics revolution [J].

Fleming, JG ;

Lin, SY .

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY V, 1999, 3874 :9-18

[5] DNA fragment sizing by single molecule detection in submicrometer-sized closed fluidic channels [J].

Foquet, M ;

Korlach, J ;

Zipfel, W ;

Webb, WW ;

Craighead, HG .

ANALYTICAL CHEMISTRY, 2002, 74 (06) :1415-1422

[6]

FU HS, 1982, Patent No. 4358340

[7] FABRICATION OF MICROMECHANICAL DEVICES FROM POLYSILICON FILMS WITH SMOOTH SURFACES [J].

GUCKEL, H ;

SNIEGOWSKI, JJ ;

CHRISTENSON, TR ;

MOHNEY, S ;

KELLY, TF .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :117-122

[8] Single-electron transistor based on a silicon-on-insulator quantum wire fabricated by a side-wall patterning method [J].

Kim, DH ;

Sung, SK ;

Sim, JS ;

Kim, KR ;

Lee, JD ;

Park, BG ;

Choi, BH ;

Hwang, SW ;

Ahn, D .

APPLIED PHYSICS LETTERS, 2001, 79 (23) :3812-3814

[9] Formation of ordered ice nanotubes inside carbon nanotubes [J].

Koga, K ;

Gao, GT ;

Tanaka, H ;

Zeng, XC .

NATURE, 2001, 412 (6849) :802-805

[10]

MASTRANGELO CH, 1992, P IEEE SOL STAT SENS, P208

← 1 2 →