Ge quantum dots in anomalous thick native germanium oxide layers

被引:2
作者
Gorokhov, EB [1 ]
Volodin, VA [1 ]
Marin, DV [1 ]
Shvets, VA [1 ]
Borisov, AG [1 ]
机构
[1] SB RAS, Inst Semicond Phys, Novosibirsk, Russia
来源
2004 INTERNATIONAL SIBERIAN WORKSHOPS AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, EDM 2004, PROCEEDINGS | 2004年
关键词
D O I
10.1109/PESC.2004.241016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An anomalous thick (up to 500 nm) native gemanium oxide layers (GeOx:(H2O)) with Ge nanoclusters were studied using photoluntinescence (PL) and ellipsometry spectroscopy techniques. Room temperature PL signal in yellow-green spectral region, as supposed, from Ge nanoclusters was observed.
引用
收藏
页码:37 / 39
页数:3
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