Process and characterization of nitrogenated carbon

被引:9
作者
Yang, MM
Chao, JL
Russak, MA
机构
[1] HMT Technology Corporation, Fremont, CA 94538
关键词
D O I
10.1109/20.617872
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Nitrogenated carbon films prepared in a DC-magnetron sputtering system were studied. Properties, including deposition rate, nitrogen content, nano-hardness, and thin film stress, were investigated as a function of deposition conditions, i.e. sputter power, substrate bias, substrate temperature, and sputter pressure.
引用
收藏
页码:3145 / 3147
页数:3
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