Normal-metal hot-electron microbolometer with on-chip protection by tunnel junctions

被引:14
作者
Chouvaev, D [1 ]
Kuzmin, L [1 ]
Tarasov, M [1 ]
机构
[1] Chalmers Univ Technol, Dept Microelect & Nanosci, S-41296 Gothenburg, Sweden
关键词
D O I
10.1088/0953-2048/12/11/386
中图分类号
O59 [应用物理学];
学科分类号
摘要
We describe recent developments in a fully on-chip integrated antenna-coupled bolometer for astrophysical applications at millimetre and submillimetre wavelengths. We have developed a normal-metal hot-electron microbolometer with Andreev mirrors for thermal protection of the absorber and the coupling to the antenna. In previous experiments we could not operate the sensor at temperatures below 300 mK presumably because of the high external noise load. Our latest results with the absorber protected by tunnel junctions show how this problem can be solved experimentally. We have achieved noise performance mostly limited by the amplifier, which corresponds to expected detector NEP on the order of 1.5 x 10(-17) W Hz(-1/2) at 100 mK.
引用
收藏
页码:985 / 988
页数:4
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