The development of atom probe field-ion microscopy

被引：23

作者：

Miller, MK ^{[1
]}

机构：

[1] Oak Ridge Natl Lab, Div Met & Ceram, Microscopy & Microanalyt Sci Grp, Oak Ridge, TN 37831 USA

来源：

MATERIALS CHARACTERIZATION | 2000年 / 44卷 / 1-2期

关键词：

D O I：

10.1016/S1044-5803(99)00053-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A review of the development of the techniques of atom probe field-ion microscopy and atom probe tomography is presented. The development is traced from the original time-of-flight atom probe field-ion microscope developed by Muller, Panitz, and McLean in 1968 to the energy-compensated three-dimensional atom probes that are commercially available today. The various types of atom probes that have been developed are described. Published by Elsevier Science Inc.

引用

页码：11 / 27

页数：17

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