共 27 条
[3]
BENITA S, 1996, MICRENCAPSULATION ME
[7]
A novel and simple fabrication method of embedded SU-8 micro channels by direct UV lithography
[J].
INTERNATIONAL MEMS CONFERENCE 2006,
2006, 34
:330-335
[10]
Droplet-based nano/picoliter mixer using hydrophobic microcapillary vent
[J].
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
1999,
:388-393