Characterisation of plasmas by advanced diagnostic methods

被引：6

作者：

Wiesemann, K

机构：

[1] Experimentalphysik Insbes. G., Ruhr-Universität Bochum

来源：

PURE AND APPLIED CHEMISTRY | 1996年 / 68卷 / 05期

关键词：

D O I：

10.1351/pac199668051029

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The paper discusses the problems with measuring characteristic plasma quantities under the nonideal conditions of plasma chemistry in low pressure discharges and gives an overview over ideas and methods for improving shortcomings of some principal diagnostic methods.

引用

收藏

页码：1029 / 1034

页数：6

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