共 26 条
- [3] Bohm S., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P92, DOI 10.1109/MEMSYS.2000.838496
- [4] Brett C.M.A., 1993, Electrochemistry: Principles, Methods, and Applications, DOI 10.1002/bbpc.19940981033
- [6] DESHMUKH AA, 2001, P 11 INT C SOL STAT, P950
- [7] Feustel A., 1996, Actuator 96. 5th International Conference on New Actuators. Conference Proceedings, P76