Dielectric analysis of integrated ceramic thin film capacitors

The paper presents a survey on the dielectric analysis of integrated ceramic capacitors. The thin film examples are based on high - permittivity paraelectric SrTiO3, solid-solution (Ba,Sr)TiO3, ferroelectric Pb(Zr,Ti)O-3, and superparaelectric BaTiO3. The current state of knowledge concerning the temperature dependence, the voltage dependence, and the frequency dependence of the permittivity and the losses is reviewed. The relation of the dielectric properties to the processing and microstructure of the ceramic thin films is outlined. With respect to the understanding of the leakage mechanism, further evidence for a complete depletion of the titanate films is presented and a refined quantitative model of the field dependence is sketched.