Microlens arrays with spatial variation of the optical functions

被引:10
作者
Hessler, T [1 ]
Rossi, M [1 ]
Pedersen, J [1 ]
Gale, MT [1 ]
Wegner, M [1 ]
Steudle, D [1 ]
Tiziani, HJ [1 ]
机构
[1] UNIV STUTTGART,INST TECH OPT,D-70569 STUTTGART,GERMANY
来源
PURE AND APPLIED OPTICS | 1997年 / 6卷 / 06期
关键词
D O I
10.1088/0963-9659/6/6/009
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Direct laser beam writing is a mature technology for the fabrication of continuous-relief micro-optical (diffractive and refractive) lenses and lens arrays having a wide range of different optical design parameters. Whereas most microlens array applications require only one specific element type, some applications can profit from the combination of micro-optical elements having different optical functions in the same array. Lens arrays with a spatial variation of the focal length and beam deflection angle have been fabricated and successfully tested in confocal microscope measurements on non-planar surfaces.
引用
收藏
页码:673 / 681
页数:9
相关论文
共 9 条
[1]   FABRICATION OF CONTINUOUS-RELIEF MICRO-OPTICAL ELEMENTS BY DIRECT LASER WRITING IN PHOTORESISTS [J].
GALE, MT ;
ROSSI, M ;
PEDERSEN, J ;
SCHUTZ, H .
OPTICAL ENGINEERING, 1994, 33 (11) :3556-3566
[2]  
GALE MT, 1997, MICRO OPTICS ELEMENT
[3]   Relaxed fabrication tolerances for low-Fresnel-number lenses [J].
Hessler, T ;
Kunz, RE .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1997, 14 (07) :1599-1606
[4]  
HESSLER T, 1995, EOS TOP M DIG SER, V5, P37
[5]   REFRACTIVE AND DIFFRACTIVE PROPERTIES OF PLANAR MICRO-OPTICAL ELEMENTS [J].
ROSSI, M ;
KUNZ, RE ;
HERZIG, HP .
APPLIED OPTICS, 1995, 34 (26) :5996-6007
[6]  
ROSSI M, 1996, 1996 OSA TECHNICAL D, V5, P233
[7]   Microlens arrays for confocal microscopy [J].
Tiziani, HJ ;
Achi, R ;
Kramer, RN ;
Hessler, T ;
Gale, MT ;
Rossi, M ;
Kunz, RE .
OPTICS AND LASER TECHNOLOGY, 1997, 29 (02) :85-91
[8]   3-DIMENSIONAL ANALYSIS BY A MICROLENS-ARRAY CONFOCAL ARRANGEMENT [J].
TIZIANI, HJ ;
UHDE, HM .
APPLIED OPTICS, 1994, 33 (04) :567-572
[9]  
VOLKEL R, 1995, EOS TOP M DIG SER, V5, P100