Bending and fatigue study on a nanoscale hinge by an atomic force microscope

被引：6

作者：

Liu, HW

Bhushan, B

机构：

[1] Ohio State Univ, Nanotribol Lab Informat Storage, Columbus, OH 43202 USA

[2] Ohio State Univ, MEMS, NEMS, Columbus, OH 43202 USA

来源：

NANOTECHNOLOGY | 2004年 / 15卷 / 09期

关键词：

D O I：

10.1088/0957-4484/15/9/023

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Fatigue of nanostructures is one of the important issues that can affect the reliable operation of micro/nanoelectromechanical systems (MEMS/NEMS). Nanoscale bending and fatigue test methodologies were developed using an atomic force microscope (AFM) to measure the elastic modulus and fatigue properties of the nanoscale hinge directly on a digital micromirror device (DMD) chip. The bending and fatigue test methodologies performed on the nanoscale could potentially be applied to other MEMS/NEMS devices.

引用

页码：1246 / 1251

页数：6

共 16 条

[1]

Avallone E.A., 1996, MARKS STANDARD HDB M, V10th

[2]

Beer FP, 1992, MECH MAT

[3] NANOTRIBOLOGY - FRICTION, WEAR AND LUBRICATION AT THE ATOMIC-SCALE [J].