Design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems

被引:132
作者
Jeon, NL [1 ]
Chiu, DT [1 ]
Wargo, CJ [1 ]
Wu, HK [1 ]
Choi, IS [1 ]
Anderson, JR [1 ]
Whitesides, GM [1 ]
机构
[1] Harvard Univ, Dept Chem & Chem Biol, Cambridge, MA 02138 USA
基金
美国国家科学基金会; 美国国家卫生研究院;
关键词
microfluidies; valves; PDMS;
D O I
10.1023/A:1014683114796
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
This paper describes the fabrication of flexible, polymeric 3-dimensional microfluidic systems with integrated check valves (flap and diaphragm valves) and a pump by stacking patterned poly(dimethylsiloxane) (PDMS) layers containing microchannels and vias. We describe this procedure for fabricating, manipulating, and bonding of PDMS membranes and bas-relief plates into multilayer microfluidic devices. The fabrication and demonstration of integrated check valves and a pump in a prototype polymer 3-dimensional microfluidic system is a step toward practical realization of all-polymer, flexible, low-cost, disposable microfluidic devices for biochemical applications.
引用
收藏
页码:117 / 121
页数:5
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