High quality GaN-InGaN heterostructures grown on (111)silicon substrates

被引:107
作者
Yang, JW
Sun, CJ
Chen, Q
Anwar, MZ
Khan, MA
Nikishin, SA
Seryogin, GA
Osinsky, AV
Chernyak, L
Temkin, H
Hu, CM
Mahajan, S
机构
[1] COLORADO STATE UNIV,DEPT ELECT ENGN,FT COLLINS,CO 80523
[2] CARNEGIE MELLON UNIV,DEPT MAT SCI & ENGN,PITTSBURGH,PA 15213
关键词
D O I
10.1063/1.117247
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the low pressure metal organic chemical vapor deposition of single crystal, wurtzitic layers of GaN and GaN/InGaN heterostructures on (111) GaAs/Si composite substrates. The structural, optical, and electrical properties of the epitaxial layers are evaluated using x-ray diffraction, transmission electron microscopy, photoluminescence, and measurements of minority carrier diffusion length. These measurements demonstrate high quality of GaN grown on the composite substrate. (C) 1996 American Institute of Physics.
引用
收藏
页码:3566 / 3568
页数:3
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