A DIRECT METHOD FOR THE EXTRACTION OF DIFFUSION LENGTH AND SURFACE RECOMBINATION VELOCITY FROM AN EBIC LINE SCAN - PLANAR JUNCTION CONFIGURATION

被引：49

作者：

CHAN, DSH

ONG, VKS

PHANG, JCH

机构：

[1] Centre for Integrated Circuit Failure Analysis and Reliability, Faculty of Engineering, National University of Singapore

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1995年 / 42卷 / 05期

关键词：

D O I：

10.1109/16.381995

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A direct method of extracting bulk minority carrier diffusion length and surface recombination velocity from an EBIC line scan in the planar configuration is described. The accuracy of the method is verified by 3-D computer simulation and compared with existing methods. It was found that this method is much simpler to use and gives better accuracy than existing methods.

引用

页码：963 / 968

页数：6

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