A DIFFUSION PROBLEM IN SEMICONDUCTOR TECHNOLOGY

被引：38

作者：

BOERSMA, J ^{[1
]}

INDENKLEEF, JJE ^{[1
]}

KUIKEN, HK ^{[1
]}

机构：

[1] PHILIPS RES LABS, EINDHOVEN, NETHERLANDS

来源：

JOURNAL OF ENGINEERING MATHEMATICS | 1984年 / 18卷 / 04期

关键词：

D O I：

10.1007/BF00042845

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：315 / 333

页数：19

共 23 条

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