Physical-chemical hybrid deposition of DLC film on rubber by T-shape filtered-arc-deposition

Stretchable and bendable diamond-like carbon (DLC) film was fabricated on rubber substrates using T-shape filtered-arc-deposition (T-FAD) with an acetylene (C2H2) gas flow, in order to provide a surface sliding property to the rubber. When the C2H2 gas was introduced, the deposition rate became higher. The film obtained under C2H2 gas was supposed to be deposited physically with cathodic ion and chemically with decomposed particles of the gas. The smoothest surface was obtained at the optimum gas flow rate at which the deposition rate was highest. The DLC film on the rubber was composed of small meshed islands. When the rubber substrate was bent several times, the islands cracked further to form smaller pieces. Hence, the reason for the deformation of the elastic DLC film together with the rubber deformation was the gradual expansion of the small DLC islands in relation to one another as more and more cracks occurred. (C) 2004 Elsevier Ltd. All rights reserved.