Laser direct writing of copper on polyimide surfaces from solution

被引:64
作者
Kordás, K
Bali, K
Leppävuori, S
Uusimäki, A
Nánai, L
机构
[1] Attila Jozsef Univ, Dept Expt Phys, H-6720 Szeged, Hungary
[2] Univ Oulu, Microelect & Mat Phys Labs, FIN-90570 Oulu, Finland
[3] Univ Oulu, EMPART Res Grp Infotech Oulu, FIN-90570 Oulu, Finland
[4] Gyula Juhasz Coll Pediat, Dept Phys, H-6720 Szeged, Hungary
基金
匈牙利科学研究基金会;
关键词
laser direct writing; deposition; solution; copper; polyimide;
D O I
10.1016/S0169-4332(99)00455-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Conductive copper patterns were deposited on polyimide (PI) substrates by using a focused, scanned continuous wave (cw) Ar+ laser beam at 488 nm wavelength. The deposition process was initiated by a photothermal reaction of a tartarate-complex solution of Cu2+ ions in an alkaline and reducing environment. Deposits were characterised by Field Emission Scanning Electron Microscope (FESEM), Energy Dispersive X-ray (EDX) Spectrometry, DEKTAK profilometer and resistance measurements. The dependence of the characteristics of laser direct written patterns on the scanning speed of the laser beam, number of scans and laser power was examined. Uniform copper lines covered with copper-oxide (line width from 30 to 60 mu m and height from 2 to 20 mu m) with high conductivity and adhesion were achieved under optimised conditions. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:399 / 404
页数:6
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