Surface and optical properties of films grown by radio frequency nanocrystalline anatase titania reactive magnetron sputtering

被引：48

作者：

Liu, FM ^{[1
]}

Wang, TM ^{[1
]}

机构：

[1] Beijing Univ Aeronaut & Astronaut, Sch Sci, Ctr Mat Phys & Chem, Beijing 100083, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2002年 / 195卷 / 1-4期

基金：

中国国家自然科学基金;

关键词：

nanocrystalline anatase TiO2 film; XRD; XPS; Raman spectra; optical properties;

D O I：

10.1016/S0169-4332(02)00569-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nanocrystalline anatase TiO2 films were deposited on glass and silicon substrates by using radio frequency reactive magnetron sputtering. Microstructural and optical properties were characterized by using X-ray diffraction (XRD), X-ray photoemission spectroscopy (XPS), Raman spectra, optical absorption and photoluminescence (PL). XRD and Raman spectroscopy detected a nanocrystalline anatase titania films for input power at 250 W, for argon/oxygen ratio at 50 sccm/5.0 sccm and for substrate temperature at 500 degreesC. Visible broad widened photoluminescence peak is interpreted as the emission of self-trapped excitons localized on TiO6 octahedra. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：284 / 290

页数：7

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