Deposition of ballas diamond and nano-crystalline diamond

被引:82
作者
Haubner, R [1 ]
Lux, B [1 ]
机构
[1] Univ Technol Vienna, Inst Chem Technol Inorgan Mat, A-1060 Vienna, Austria
关键词
diamond; ballas-diamond; nano-crystalline diamond;
D O I
10.1016/S0263-4368(02)00006-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nano-crystalline materials are of high interest, because mechanical and physical properties of such materials are different from coarse grained types. In case of diamond the CVD ballas type is a nano-crystalline material. Other names for ballas are also common; e.g. ball-shaped diamond, cauliflower like. nano-crystalline diamond. Ballas is a non-faceted. polycrystalline spherically grown diamond having a radial structure. Several morphological ballas structures have been observed by varying the deposition conditions, i.e. ballas having faceted areas, flat ballas, ballas with graphitic inclusions, etc. The nano-crystalline diamond coatings were reported during the last years and grown by adding fullerens to the deposition gas or using Ar/CH(4) mixtures with less H(2) additions. From the present point of view the ballas morphologies can be described by various microstructures. The nano-crystalline diamond is one of these microstructures. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:93 / 100
页数:8
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