NUCLEATION ENHANCEMENT OF DIAMOND WITH AMORPHOUS FILMS

被引：70

作者：

BARNES, PN

WU, RLC

机构：

[1] Plasma Research Group (POOC-3), Wright Laboratory, Wright-Patterson AFB

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 01期

关键词：

D O I：

10.1063/1.108811

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The nucleation and growth of diamond on pretreated Si substrates were studied. The diamond films were produced by microwave plasma enhanced chemical vapor deposition (PECVD). The pretreatment consisted of an amorphous carbon film also deposited by microwave PECVD. The Si was previously scratched with 0.5 mum diamond paste and cleaned in acetone. This pretreatment of Si resulted in diamond nucleation at densities averaging around 3 X 10(10) cm-2, several orders of magnitude higher than scratched Si alone.

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页码：37 / 39

页数：3

相关论文

共 13 条

[1] DIAMOND CHEMICAL VAPOR-DEPOSITION [J].

CELII, FG ;

BUTLER, JE .

ANNUAL REVIEW OF PHYSICAL CHEMISTRY, 1991, 42 (01) :643-684

[2]

GLASS JT, 1992, 3RD ANN DIAM TECHN W

[3]

HAQ S, 1991, APPLICATIONS DIAMOND, P405

[4] INTERMEDIATE LAYERS FOR THE DEPOSITION OF POLYCRYSTALLINE DIAMOND FILMS [J].

HARTNETT, T ;

MILLER, R ;

MONTANARI, D ;

WILLINGHAM, C ;

TUSTISON, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03) :2129-2136

[5] EARLY FORMATION OF CHEMICAL VAPOR-DEPOSITION DIAMOND FILMS [J].

IIJIMA, S ;

AIKAWA, Y ;

BABA, K .

APPLIED PHYSICS LETTERS, 1990, 57 (25) :2646-2648

[6]

KIM JW, 1991, APPLICATIONS DIAMOND, P399

[7] SELECTIVE NUCLEATION AND GROWTH OF DIAMOND PARTICLES BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

MA, JS ;

KAWARADA, H ;

YONEHARA, T ;

SUZUKI, J ;

WEI, J ;

YOKOTA, Y ;

HIRAKI, A .

APPLIED PHYSICS LETTERS, 1989, 55 (11) :1071-1073

[8] EFFECTS OF SURFACE PRETREATMENTS ON NUCLEATION AND GROWTH OF DIAMOND FILMS ON A VARIETY OF SUBSTRATES [J].

MORRISH, AA ;

PEHRSSON, PE .

APPLIED PHYSICS LETTERS, 1991, 59 (04) :417-419

[9] INSITU GROWTH-RATE MEASUREMENT AND NUCLEATION ENHANCEMENT FOR MICROWAVE PLASMA CVD OF DIAMOND [J].

STONER, BR ;

WILLIAMS, BE ;

WOLTER, SD ;

NISHIMURA, K ;

GLASS, JT .

JOURNAL OF MATERIALS RESEARCH, 1992, 7 (02) :257-260

[10] SYNTHESIS AND CHARACTERIZATION OF FINE-GRAIN DIAMOND FILMS [J].

WU, RLC ;

RAI, AK ;

GARSCADDEN, A ;

KEE, P ;

DESAI, HD ;

MIYOSHI, K .

JOURNAL OF APPLIED PHYSICS, 1992, 72 (01) :110-116