DIAMOND CHEMICAL VAPOR-DEPOSITION

被引：140

作者：

CELII, FG ^{[1
]}

BUTLER, JE ^{[1
]}

机构：

[1] USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375

来源：

关键词：

OPTICAL DIAGNOSTICS; INSITU TECHNIQUES; GROWTH MODELING; GAS-PHASE KINETICS; NUCLEATION;

D O I：

10.1146/annurev.pc.42.100191.003235

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

页码：643 / 684

页数：42

共 228 条

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