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DIAMOND CHEMICAL VAPOR-DEPOSITION
被引:140
作者
:
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375
USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375
CELII, FG
[
1
]
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375
USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375
BUTLER, JE
[
1
]
机构
:
[1]
USN,RES LAB,GAS SURFACE DYNAM SECT,WASHINGTON,DC 20375
来源
:
ANNUAL REVIEW OF PHYSICAL CHEMISTRY
|
1991年
/ 42卷
/ 01期
关键词
:
OPTICAL DIAGNOSTICS;
INSITU TECHNIQUES;
GROWTH MODELING;
GAS-PHASE KINETICS;
NUCLEATION;
D O I
:
10.1146/annurev.pc.42.100191.003235
中图分类号
:
O64 [物理化学(理论化学)、化学物理学];
学科分类号
:
070304 ;
081704 ;
摘要
:
[No abstract available]
引用
收藏
页码:643 / 684
页数:42
相关论文
共 228 条
[21]
BELTON DN, 1990, SURF SCI, V233, P133
[22]
Benson, 1976, THERMOCHEMICAL KINET, V23, P613
[23]
BRENNER DW, 1991, MAT RES S C, P39
[24]
Bruton E, 1978, DIAMONDS
[25]
AN INVESTIGATION OF DIAMOND FILM DEPOSITION IN A PREMIXED OXYACETYLENE FLAME
CAPPELLI, MA
论文数:
0
引用数:
0
h-index:
0
机构:
High Temperature Gasdynamics Laboratory, Stanford University, Stanford
CAPPELLI, MA
PAUL, PH
论文数:
0
引用数:
0
h-index:
0
机构:
High Temperature Gasdynamics Laboratory, Stanford University, Stanford
PAUL, PH
[J].
JOURNAL OF APPLIED PHYSICS,
1990,
67
(05)
: 2596
-
2602
[26]
DETECTION OF GROUND-STATE ATOMIC-HYDROGEN IN A DC-PLASMA USING 3RD-HARMONIC GENERATION
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
CELII, FG
THORSHEIM, HR
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
THORSHEIM, HR
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
BUTLER, JE
PLANO, LS
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
PLANO, LS
PINNEO, JM
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
PINNEO, JM
[J].
JOURNAL OF APPLIED PHYSICS,
1990,
68
(08)
: 3814
-
3817
[27]
HYDROGEN-ATOM DETECTION IN THE FILAMENT-ASSISTED DIAMOND DEPOSITION ENVIRONMENT
CELII, FG
论文数:
0
引用数:
0
h-index:
0
CELII, FG
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
BUTLER, JE
[J].
APPLIED PHYSICS LETTERS,
1989,
54
(11)
: 1031
-
1033
[28]
INFRARED DETECTION OF GASEOUS SPECIES DURING THE FILAMENT-ASSISTED GROWTH OF DIAMOND
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
CELII, FG
PEHRSSON, PE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
PEHRSSON, PE
WANG, HT
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
WANG, HT
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
BUTLER, JE
[J].
APPLIED PHYSICS LETTERS,
1988,
52
(24)
: 2043
-
2045
[29]
THE EFFECTS OF UV LASER IRRADIATION ON THE FILAMENT-ASSISTED DEPOSITION OF DIAMOND
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
CELII, FG
NELSON, HH
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
NELSON, HH
PEHRSSON, PE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
PEHRSSON, PE
[J].
JOURNAL OF MATERIALS RESEARCH,
1990,
5
(11)
: 2337
-
2344
[30]
CELII FG, 1991, MAT RES S C, P631
←
1
2
3
4
5
6
7
8
9
10
→
共 228 条
[21]
BELTON DN, 1990, SURF SCI, V233, P133
[22]
Benson, 1976, THERMOCHEMICAL KINET, V23, P613
[23]
BRENNER DW, 1991, MAT RES S C, P39
[24]
Bruton E, 1978, DIAMONDS
[25]
AN INVESTIGATION OF DIAMOND FILM DEPOSITION IN A PREMIXED OXYACETYLENE FLAME
CAPPELLI, MA
论文数:
0
引用数:
0
h-index:
0
机构:
High Temperature Gasdynamics Laboratory, Stanford University, Stanford
CAPPELLI, MA
PAUL, PH
论文数:
0
引用数:
0
h-index:
0
机构:
High Temperature Gasdynamics Laboratory, Stanford University, Stanford
PAUL, PH
[J].
JOURNAL OF APPLIED PHYSICS,
1990,
67
(05)
: 2596
-
2602
[26]
DETECTION OF GROUND-STATE ATOMIC-HYDROGEN IN A DC-PLASMA USING 3RD-HARMONIC GENERATION
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
CELII, FG
THORSHEIM, HR
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
THORSHEIM, HR
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
BUTLER, JE
PLANO, LS
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
PLANO, LS
PINNEO, JM
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
PINNEO, JM
[J].
JOURNAL OF APPLIED PHYSICS,
1990,
68
(08)
: 3814
-
3817
[27]
HYDROGEN-ATOM DETECTION IN THE FILAMENT-ASSISTED DIAMOND DEPOSITION ENVIRONMENT
CELII, FG
论文数:
0
引用数:
0
h-index:
0
CELII, FG
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
BUTLER, JE
[J].
APPLIED PHYSICS LETTERS,
1989,
54
(11)
: 1031
-
1033
[28]
INFRARED DETECTION OF GASEOUS SPECIES DURING THE FILAMENT-ASSISTED GROWTH OF DIAMOND
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
CELII, FG
PEHRSSON, PE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
PEHRSSON, PE
WANG, HT
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
WANG, HT
BUTLER, JE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,CTR SAFETY & SURVIVABIL,WASHINGTON,DC 20375
BUTLER, JE
[J].
APPLIED PHYSICS LETTERS,
1988,
52
(24)
: 2043
-
2045
[29]
THE EFFECTS OF UV LASER IRRADIATION ON THE FILAMENT-ASSISTED DEPOSITION OF DIAMOND
CELII, FG
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
CELII, FG
NELSON, HH
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
NELSON, HH
PEHRSSON, PE
论文数:
0
引用数:
0
h-index:
0
机构:
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
USN,RES LAB,DIV CHEM,WASHINGTON,DC 20375
PEHRSSON, PE
[J].
JOURNAL OF MATERIALS RESEARCH,
1990,
5
(11)
: 2337
-
2344
[30]
CELII FG, 1991, MAT RES S C, P631
←
1
2
3
4
5
6
7
8
9
10
→