Ultrasonic properties of lead zirconate titanate thin films in UHF-SHF range

被引：25

作者：

Hanajima, N ^{[1
]}

Tsutsumi, S ^{[1
]}

Yonezawa, T ^{[1
]}

Hashimoto, K ^{[1
]}

Nanjo, R ^{[1
]}

Yamaguchi, M ^{[1
]}

机构：

[1] CHIBA UNIV,DEPT ELECT & ELECT ENGN,CHIBA 263,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 9B期

关键词：

PZT thin film; sol-gel; bulk wave transducer; ultrasonic property;

D O I：

10.1143/JJAP.36.6069

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe the ultrasonic properties of lead zirconate titanate (PZT) thin films prepared by the sol-gel method. Tt is shown that the PZT thin film exhibits efficient transduction of bulk and surface acoustic waves in UHF-SHF range. A conversion loss of less than 4dB is achieved for bulk wave excitation and detection at 1.7 GHz, where the electromechanical coupling factor k(t) reaches 30%. This indicates that the PZT thin film is promising for use in the development of large-bandwidth resonators and filters in modern communication systems as well as for high-frequency ultrasonic transducer applications.

引用

页码：6069 / 6072

页数：4

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