Phase separation in InGaN thick films and formation of InGaN/GaN double heterostructures in the entire alloy composition

被引:464
作者
Singh, R
Doppalapudi, D
Moustakas, TD
Romano, LT
机构
[1] BOSTON UNIV, CTR PHOTON RES, MOL BEAM EPITAXY LAB, BOSTON, MA 02215 USA
[2] XEROX CORP, PALO ALTO RES CTR, PALO ALTO, CA 94304 USA
关键词
III-V; GROWTH; GAN; SEMICONDUCTORS; INN;
D O I
10.1063/1.118493
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the growth of InGaN thick films and InGaN/GaN double heterostructures by molecular beam epitaxy at the substrate temperatures 700-800 degrees C, which is optimal for the growth of GaN. X-ray diffraction and optical absorption studies show phase separation of InN for InxGa1-xN thick films with x>0.3. On the other hand, InxGa1-xN/GaN double heterostructures show no evidence of phase separation within the detection capabilities of our methods. These observations were accounted for using Stringfellow's model on phase separation, which gives a critical temperature for miscibility of the GaN-InN system equal to 2457 K. (C) 1997 American Institute of Physics.
引用
收藏
页码:1089 / 1091
页数:3
相关论文
共 18 条
[1]   EPITAXIAL-GROWTH AND CHARACTERIZATION OF ZINCBLENDE GALLIUM NITRIDE ON (001) SILICON [J].
LEI, T ;
MOUSTAKAS, TD ;
GRAHAM, RJ ;
HE, Y ;
BERKOWITZ, SJ .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (10) :4933-4943
[2]   2-DIMENSIONAL PHASE-SEPARATION AND SURFACE-RECONSTRUCTION DRIVEN ATOMIC ORDERING IN MIXED III-V-LAYERS [J].
MAHAJAN, S .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1995, 30 (2-3) :187-196
[3]  
MATSOKIN AM, 1990, SOV J NUMER ANAL MAT, V5, P53
[4]   WIDE-GAP SEMICONDUCTOR INGAN AND INGAALN GROWN BY MOVPE [J].
MATSUOKA, T ;
YOSHIMOTO, N ;
SASAKI, T ;
KATSUI, A .
JOURNAL OF ELECTRONIC MATERIALS, 1992, 21 (02) :157-163
[5]  
Moustakas T. D., 1993, Semiconductor Heterostructures for Photonic and Electronic Applications Symposium, P753
[6]   GROWTH OF GAN BY ECR-ASSISTED MBE [J].
MOUSTAKAS, TD ;
LEI, T ;
MOLNAR, RJ .
PHYSICA B, 1993, 185 (1-4) :36-49
[7]  
MOUSTAKAS TD, 1992, MATER RES SOC SYMP P, V242, P427, DOI 10.1557/PROC-242-427
[8]   GROWTH OF INXGA(1-X)N COMPOUND SEMICONDUCTORS AND HIGH-POWER INGAN/AIGAN DOUBLE-HETEROSTRUCTURE VIOLET-LIGHT-EMITTING DIODES [J].
NAKAMURA, S .
MICROELECTRONICS JOURNAL, 1994, 25 (08) :651-659
[9]   INXGA(1-X)N/INYGA(1-Y)N SUPERLATTICES GROWN ON GAN FILMS [J].
NAKAMURA, S ;
MUKAI, T ;
SENOH, M ;
NAGAHAMA, S ;
IWASA, N .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (06) :3911-3915
[10]   FUNDAMENTAL ABSORPTION-EDGE IN GAN, INN AND THEIR ALLOYS [J].
OSAMURA, K ;
OHTSUKI, A ;
SHINGU, PH ;
MURAKAMI, Y ;
NAKAJIMA, K .
SOLID STATE COMMUNICATIONS, 1972, 11 (05) :617-&