Patterned low temperature copper-rich deposits using inkjet printing

被引：64

作者：

Rozenberg, GG

Bresler, E

Speakman, SP

Jeynes, C

Steinke, JHG ^{[1
]}

机构：

[1] Univ London Imperial Coll Sci Technol & Med, Dept Chem, London SW7 2AY, England

[2] Patterning Technol Ltd, Omega Ctr 4, Biggleswade SG18 8QB, Beds, England

[3] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

[4] Univ Surrey, Ion Beam Ctr, Guildford GU2 7XH, Surrey, England

来源：

APPLIED PHYSICS LETTERS | 2002年 / 81卷 / 27期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1063/1.1481985

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A PZT piezoelectric ceramic research drop-on-demand inkjet print head operating in bend made was used as a means of delivering a copper precursor, vitiyltrimethylsilane copper (+ 1) hexafluoroacetylacetonate, in a controlled and placement accurate fashion. The reagent disproportionates at low temperature (< 200 degrees C), to deposit copper on glass. These deposits are shown to be more than 90% copper by weight by electron probe microanalysis and microbeam Rutherford backscattering spectroscopy. Microscopy shows a deposit diameter and three-dimensional profile that suggests a complex deposition and conversion mechanism. Our findings represent an important step towards the manufacture of electronic devices by entirely nonlithographic means. (C) 2002 American Institute of Physics.

引用

页码：5249 / 5251

页数：3

共 30 条

[1] High-depth-resolution Rutherford backscattering data and error analysis of SiGe systems using the simulated annealing and Markov chain Monte Carlo algorithms [J].