Effects of sapphire substrate annealing on ZnO epitaxial films grown by MOCVD

被引：25

作者：

Wang, Yinzhen

Wang, Shunquan

Zhou, Shengming

Xu, Jun

Ye, Jiandong

Gu, Shulin

Zhang, Rong

Ren, Qiushi

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China

[2] Nanjing Univ, Lab Solid State Microstruct, Nanjing 210093, Peoples R China

[3] Nanjing Univ, Dept Phys, Nanjing 210093, Peoples R China

[4] Shanghai Jiao Tong Univ, Dept Biomed Engn, Shanghai 200240, Peoples R China

[5] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2006年 / 253卷 / 04期

关键词：

ZnO; sapphire; annealing; AFM; XRD; PL;

D O I：

10.1016/j.apsusc.2006.03.020

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The annealing effects of sapphire substrate on the quality of epitaxial ZnO films grown by metalorganic chemical vapor deposition (MOCVD) were studied. The atomic steps formed on (0 0 0 1) sapphire (alpha-Al2O3) substrate surface by annealing at high temperature was analyzed by atomic force microscopy (AFM). The annealing effects of sapphire substrate on the ZnO films were examined by X-ray diffraction (XRD), AFM and photoluminescence (PL) measurements. Experimental results indicate that the film quality is strongly affected by annealing treatment of the sapphire substrate surface., The optimum annealing temperature of sapphire substrates is given. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：1745 / 1747

页数：3

共 13 条

[11] Growth of ZnO thin films on interdigital transducer Corning 7059 glass substrates by two-step fabrication methods for surface acoustic wave applications [J].