Temperature-insensitive micromachined AlGaAs-GaAs vertical cavity filter

被引：30

作者：

Amano, T ^{[1
]}

Koyama, F ^{[1
]}

Nishiyama, N ^{[1
]}

Iga, K ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Yokohama, Kanagawa 2268503, Japan

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2000年 / 12卷 / 05期

关键词：

add-drop filter; micromachining; semiconductor distibuted Bragg reflector (DBR);

D O I：

10.1109/68.841269

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have demonstrated a temperature-insensitive micromachined vertical cavity filter with an AlGaAs-GaAs distributed Bragg reflector (DBR), which can be thermally tuned by differential thermal expansion. The achieved temperature dependence was as small as +0.01 nm/K, which is one-tenth of that of conventional semiconductor based optical filters.

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收藏

页码：510 / 512

页数：3

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