Time and frequency response of two-arm micromachined thermal actuators

被引:168
作者
Hickey, R [1 ]
Sameoto, D
Hubbard, T
Kujath, M
机构
[1] Nortel Networks, Opt Components, Nepean, ON K2H 8E9, Canada
[2] Dalhousie Univ, Dept Engn Mech, Halifax, NS B3J 1B6, Canada
关键词
D O I
10.1088/0960-1317/13/1/306
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper examines the time and frequency response characteristics of two-ami micromachined thermal actuators. Two types of thermal actuators are considered: hot/cold arm actuators and 'V' or 'chevron' shaped actuators. A heat transfer equation governing the temperature profile along the thermal actuators is derived. Equations for the thermal time constants and the frequency responses are presented. The thermal time constants and frequency responses are measured experimentally and compared to analytical predictions.
引用
收藏
页码:40 / 46
页数:7
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