Time and frequency response of two-arm micromachined thermal actuators

被引：168

作者：

Hickey, R ^{[1
]}

Sameoto, D

Hubbard, T

Kujath, M

机构：

[1] Nortel Networks, Opt Components, Nepean, ON K2H 8E9, Canada

[2] Dalhousie Univ, Dept Engn Mech, Halifax, NS B3J 1B6, Canada

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2003年 / 13卷 / 01期

关键词：

D O I：

10.1088/0960-1317/13/1/306

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper examines the time and frequency response characteristics of two-ami micromachined thermal actuators. Two types of thermal actuators are considered: hot/cold arm actuators and 'V' or 'chevron' shaped actuators. A heat transfer equation governing the temperature profile along the thermal actuators is derived. Equations for the thermal time constants and the frequency responses are presented. The thermal time constants and frequency responses are measured experimentally and compared to analytical predictions.

引用

页码：40 / 46

页数：7

共 12 条

[1]

BARRON C, 1997, INT C SOL STAT SENS, P769

[2]

BRIGHT VM, 1995, SPIE, V2642, P10

[3]

CRAGUN, 1999, P ASME IMECE, P181

[4] Simulation, dynamic testing and design of micromachined flexible joints [J].

Fettig, H ;

Wylde, J ;

Hubbard, T ;

Kujath, M .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2001, 11 (03) :209-216

[5]

HICKEY R, 2002, THESIS DALHOUSIE U, V20, P971

[6] Analysis and design of polysilicon thermal flexure actuator [J].

Huang, QA ;

Lees, NKS .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1999, 9 (01) :64-70

[7]

Incropera F.P., 1990, FUNDAMENTALS HEAT MA

[8]

LOTT, 2001, INT C MOD SIM MICR H

[9]

MANGINELL R, 1994, THESIS U NEW MEXICO

[10]

Rohsenow W.M., 1973, . Handbook of Heat Transfer

← 1 2 →