Aerosol-assisted MOCVD growth of Gd2O3-doped CeO2 thin SOFC electrolyte film on anode substrate

被引：81

作者：

Song, HZ ^{[1
]}

Wang, HB ^{[1
]}

Zha, SW ^{[1
]}

Peng, DK ^{[1
]}

Meng, GY ^{[1
]}

机构：

[1] Univ Sci & Technol China, Dept Mat Sci & Engn, Hefei 230026, Anhui, Peoples R China

来源：

SOLID STATE IONICS | 2003年 / 156卷 / 03期

基金：

中国国家自然科学基金;

关键词：

AA-MOCVD; GDC; thin films; SOFCs; sheet resistance;

D O I：

10.1016/S0167-2738(02)00688-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Aerosol-assisted metal-organic chemical vapor deposition (AA-MOCVD) with beta-diketonate precursors was employed in depositing thin films of solid oxide fuel cells (SOFCs) electrolyte material, gadolinia-doped ceria (GDC), on anode (NiO + YSZ) substrates. The films have been successfully synthesized in a wide temperature range (300-600 degreesC) and characterized by X-ray powder diffraction, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The sheet resistance measurements were carried out between 350 and 850 degreesC to study the effects of adsorbed oxygen on film ionic conductivity. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：249 / 254

页数：6

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