Monte Carlo simulations of high-performance implant free In0.3Ga0.7As nano-MOSFETs for low-power CMOS applications

The potential performance of implant free heterostructure In0.3Ga0.7As channel MOSFETs with gate lengths of 30, 20, and 15 nm is investigated using state-of-the-art Monte Carlo (MC) device simulations. The simulations are carefully calibrated against the electron mobility and sheet density measured on fabricated III-V MOSFET structures with a high-kappa dielectric. The MC simulations show that the 30 nm gate length implant free MOSFET can deliver a drive current of 2174 mu A/mu m at 0.7 V supply voltage. The drive current increases to 2542 mu A/mu m in the 20 nm gate length device, saturating at 2535 mu A/mu m in the 15 nm gate length one. When quantum confinement corrections are included into MC simulations, they have a negligible effect on the drive current in the 30 and 20 nm gate length transistors but lower the 15 nm gate length device drive current at 0.7 V supply voltage by 10%. When compared to equivalent Si based MOSFETs, the implant free heterostructure MOSFETs can deliver a very high performance at low supply voltage, making them suitable for low-power high-performance CMOS applications.