Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

被引：75

作者：

Crawford, T. H. R. ^{[1
]}

Haugen, H. K.

机构：

[1] McMaster Univ, Dept Engn Phys, Hamilton, ON L8S 4L7, Canada

[2] McMaster Univ, Dept Phys & Astron, Hamilton, ON L8S 4L7, Canada

来源：

APPLIED SURFACE SCIENCE | 2007年 / 253卷 / 11期

基金：

加拿大自然科学与工程研究理事会; 加拿大创新基金会;

关键词：

femtosecond pulsed laser; silicon; surface morphology; sub-wavelength period;

D O I：

10.1016/j.apsusc.2006.11.004

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We present periodic ripples and arrays of protrusions formed on the surface of silicon after irradiation by low-fluence linearly polarized femtosecond laser pulses. Laser-induced periodic surface structures (LIPSS) are observed for irradiation at center wavelengths of 800, similar to 1300, and similar to 2100 nm, with the structure periods somewhat less than the incident wavelengths in air. Additionally, we observe structures with spatial periods substantially less than the incident laser wavelengths. These sub-wavelength periodic structures form only when the photon energy is less than the silicon bandgap energy. We discuss a number of factors which may contribute to the generation of this surface morphology. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：4970 / 4977

页数：8

共 52 条

[21] New ripple patterns observed in excimer-laser irradiated SiO2 polycrystalline silicon SiO2 structures [J].

Giust, GK ;

Sigmon, TW .

APPLIED PHYSICS LETTERS, 1997, 70 (26) :3552-3554

[22] GROWTH OF SPONTANEOUS PERIODIC SURFACE-STRUCTURES ON SOLIDS DURING LASER ILLUMINATION [J].

GUOSHENG, Z ;

FAUCHET, PM ;

SIEGMAN, AE .

PHYSICAL REVIEW B, 1982, 26 (10) :5366-5381

[23] Microstructuring of silicon with femtosecond laser pulses [J].

Her, TH ;

Finlay, RJ ;

Wu, C ;

Deliwala, S ;

Mazur, E .

APPLIED PHYSICS LETTERS, 1998, 73 (12) :1673-1675

[24] Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses [J].

Jia, TQ ;

Chen, HX ;

Huang, M ;

Zhao, FL ;

Qiu, JR ;

Li, RX ;

Xu, ZZ ;

He, XK ;

Zhang, J ;

Kuroda, H .

PHYSICAL REVIEW B, 2005, 72 (12)

[25] Physico-chemical aspects of femtosecond-pulse-laser-induced surface nanostructures [J].

Kautek, W ;

Rudolph, P ;

Daminelli, G ;

Krüger, J .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (01) :65-70

[26] Generation of wavelength-dependent, periodic line pattern in metal nanoparticle-containing polymer films by femtosecond laser irradiation -: art. no. 153111 [J].

Kiesow, A ;

Strohkark, S ;

Löschner, K ;

Heilmann, A ;

Podlipensky, A ;

Abdolvand, A ;

Seifert, G .

APPLIED PHYSICS LETTERS, 2005, 86 (15) :1-3

[27] Single and multiple shot near-infrared femtosecond laser pulse ablation thresholds of copper [J].

Kirkwood, SE ;

van Popta, AC ;

Tsui, YY ;

Fedosejevs, R .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (04) :729-735

[28] Sub-100 nm nanostructuring of silicon by ultrashort laser pulses [J].

Le Harzic, R ;

Schuck, H ;

Sauer, D ;

Anhut, T ;

Riemann, I ;

König, K .

OPTICS EXPRESS, 2005, 13 (17) :6651-6656

[29] Laser induced formation of periodic nanostructures in silicon covered by SiO2 [J].

Liao, Y ;

Degorce, JY ;

Meunier, M .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2006, 82 (04) :679-682

[30] Nano and microscale surface and sub-surface modifications induced in optical materials by femtosecond laser machining [J].

Malshe, A ;

Deshpande, D .

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2004, 149 (1-3) :585-590

← 1 2 3 4 5 6 →