Genetic algorithms as applied to reconstruction of surface morphology from an SEM image

A reconstruction method of surface morphology from a scanning electron microscope (SEM) image is proposed. In comparison with conventional stereometric and multiple-detector methods, the proposed system requires only a secondary electron image taken by a conventional SEM for reconstruction of microstructures of a specimen surface. This method is an application of genetic algorithms, which are search algorithms based on the mechanics of natural selection and genetics, to surface morphology in SEM. To test the capability of this method, a cross-section is successfully reconstructed from a calculated line scan of hemicycle surface composed of a single element.